XPS analysis of the activation process in non-evaporable getter thin films

  1. Lozano, M.P.
  2. Fraxedas, J.
Journal:
Surface and Interface Analysis

ISSN: 0142-2421

Year of publication: 2000

Volume: 30

Issue: 1

Pages: 623-627

Type: Article

DOI: 10.1002/1096-9918(200008)30:1<623::AID-SIA719>3.0.CO;2-Y GOOGLE SCHOLAR