Multiscale simulation of the focused electron beam induced deposition process
- de Vera, P.
- Azzolini, M.
- Sushko, G.
- Abril, I.
- Garcia-Molina, R.
- Dapor, M.
- Solov’yov, I.A.
- Solov’yov, A.V.
Revue:
Scientific Reports
ISSN: 2045-2322
Année de publication: 2020
Volumen: 10
Número: 1
Type: Article